精确测量双层复合膜厚度的物理原理——用PCSA型光学系统处理四相体系

本文给出了一种直接测量双层复合膜厚度的方法,并讨论了这种测量方法的物理原理,所得公式在一级近似条件下,可以将公式推广以适用于更多层的透明介质膜,为了进一步提高测量的精确度,我们推出了更为精确的公式,并用电子计算机取得了一套数据,现将数据编制成册,绘制成图表。这种直接测量双层薄膜厚度的方法,不需要高级复杂的设备,仍然只使用椭偏仪,其物理原理就是用PCSA光学系统处理一个四相样品体系的问题。

THE PRINCIPLE OF ACCURATE MEASUREMENT OF THICKNESS OF COMPOUND THIN FILMS

In this paper, a method which can directly measure the thickness of compound thin films is given and the underlying principles are discussed. In the first approximation, the conclusion can be extended to the film with more layers. In order to increase the accuray of measurement, we obtained a more accurate equation and a set of data from electrinic computer. For the convenience of application, we set down all these data in the form of a handbook and express them with some diagrams.This direct method of measuring compound thin films on the substrate does not need any advanced equipment but only a ordinary ellipsometry. In principle, a PCSA optical system is to be used to solve the four-phase problem.