热处理参数对溶胶-凝胶法制备氧化锌薄膜特性的影响

采用溶胶-凝胶旋涂法在Si(111)衬底上生长了ZnO薄膜，并用荧光光谱、原子力显微镜和XRD对ZnO薄膜样品进行了分析.结果表明，溶胶-凝胶旋涂法制备的ZnO薄膜为纤锌矿结构，其c轴取向程度与热处理温度有很大的关系.当热处理温度小于550℃时，氧化锌薄膜在室温下均有较强的紫外带边发射峰，而可见波段的发射很弱；当热处理温度高于550℃时，可见波段发射明显增强.对经过不同时间热处理的ZnO薄膜样品分析表明，氧化锌薄膜的荧光特性及表面形貌与热处理时间也有很大关系，时间过短可见波段的发射较强，但时间过长会导致晶 关键词： ZnO薄膜 光致发光

Influences of processing parameters on the properties of ZnO thin films prepared by sol-gel spin-coating

Zinc oxide films were prepared on Si(111) substrates by sol-gel spin-coating technique.Structure,photoluminescence,and surface morphology of ZnO thin films processed at various temperatures and times were investigated.Results showed that ZnO thin films showed a hexagonal wurtzite structure,and the extent of c-axis orientation was dependent on the processing temperature.All the thin films emitted strong band to band UV emission without defects related visible emissions at room temperature when the processing temperature was below 550℃.When the processing temperature exceeded 550℃,a strong emission band appeared in the visible region.Results also showed that the photoluminescence spectrum was dependent not only on the processing temperature but also on the processing time.Long time(3 hours) processing resulted in the aggregation of ZnO grains in the film and a lower band to band emission in the photoluminescence spectrum.