X射线光电子能谱辅助Raman光谱分析类金刚石碳膜的结构细节

分别采用具有和不具有弯曲弧磁过滤器的两种真空阴极弧离子镀方法,在不同工艺参量下制备了类金刚石碳膜.采用Raman光谱和X射线光电子能谱(XPS),分析了不同工艺参量下的类金刚石碳膜的键结构,通过对Raman光谱的D峰、G峰和C1s电子结合能峰位、强度的对比,详细讨论了沉积工艺参量对类金刚石碳膜结构的影响.研究发现,不同工艺下具有高强度D峰Raman光谱的类金刚石碳膜,其C1s电子结合能却分别位于284.15,285.50eV,表明高度石墨化和高度金刚石化两种状态类金刚石碳膜,都可以形成具有高强度D峰Raman光谱曲线 关键词： 类金刚石碳膜 Raman光谱 X射线光电子能谱

COMPARATIVE ANALYSIS OF DLC FLIM FINE STRUCTURE BY RAMAN SPECTRA AND X-RAY PHOTOELECTRON SPECTROSCOPY

The diamond-like carbon (DLC) films were deposited under different deposition parameters by using arc technology. The detailed relationship of sp3 structure with the D peak of the DLC films' Raman spectra is discussed. In aid of the discussion, X-ray photoelectron spectroscopy was used to determine the DLC films' C1s binding energy. By comparing the binding energy with the Raman shift of the films, it can be found that the intensity of D peak decomposed from the Raman shift can be increased not only by the graphite cluster, but also by higher content of sp3 bonds. Higher sp3 content of DLC films can be obtained by using 90 degree magnetic filter. The study shows that the C1s binding energy of DLC films, whose Raman spectra have higher intensity of D peak, can be 284.15 or 285.50 eV, which reveals that the DLC films may have higher graphite-like or diamond-like structure, respectively.