基于透射光谱确定溶胶凝胶ZrO2薄膜的光学常数

基于溶胶凝胶ZrO₂薄膜的紫外/可见/近红外透射实验光谱，采用Swanepoel方法结合Wemple-DiDomenico色散模型，方便地导出了ZrO₂薄膜在200—1200nm波长范围内的光学常数，包括折射率、色散常数、膜层厚度、吸收系数及能量带隙.研究发现，溶胶凝胶ZrO₂薄膜具有高折射率(1.63—1.93，测试波长为632.8nm)、低吸收和直接能量带隙(4.97—5.63eV) 等光学特性，而且其光学常数对薄膜制备过程中的重要工艺 关键词： 光学常数 Swanepoel方法 2薄膜')" href="#">ZrO₂薄膜 热处理

Determination of the optical constants of sol-gel derived ZrO2 films simply form the transmission spectra

By combining Swanepoels theory and the Wemple-DiDomenico dispersion model， a simple method was established to determine the optical constants of the sol-gel derived ZrO₂ films directly from the corresponding transmission spectra. The results showed that the sol-gel ZrO₂ films exhibite the optical characteristics of high refractive index of 1.63—1.93 (at 632.8nm)， negligible absorption in spectral region of 400—1200nm， as well as the direct band gap of about 4.97—5.63eV. And the specific values of the optical constants strongly depend on the annealing temperature, which is one of the important technologicalparameters for the sol-gel preparation of ZrO₂ films. Moreover， in the weakand medium absorption spectral regions， the calculated values of refractive indices are in satisfactory agreement with the results derived from the high-resolution Tek 3000 film-characterization system， indicating the reliability and feasibility of the method in determining the optical constants of ZrO₂ films.