| 用完全非共振光驻波聚焦原子制作纳米结构分析 |
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| 引用本文： | 陈献忠,姚汉民,陈旭南.用完全非共振光驻波聚焦原子制作纳米结构分析[J].物理学报,2005,54(6):2645-2652. |
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| 作者姓名： | 陈献忠 姚汉民 陈旭南 |
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| 作者单位： | 中国科学院光电技术研究所微细加工光学技术国家重点实验室，成都 610209 |
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| 基金项目： | 中国科学院知识创新工程项目（批准号：A2K0009）和开放基金资助的课题. |
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| 摘 要： | 用完全非共振激光驻波场对热原子束实现纳米量级的聚焦，可以降低原子光刻试验的难度. 用蒙特卡罗算法和轨迹模拟法分析原子源对原子聚焦的影响，结果表明靶的有效尺寸对纳米 图形线宽的影响远大于原子束的发散角和原子的纵向速度分布. 提出几种改进试验的方法.
关键词：
完全非共振激光驻波场
原子聚焦
纳米结构制作
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| 关 键 词： | 完全非共振激光驻波场 原子聚焦 纳米结构制作 |
| 文章编号： | 1000-3290/2005/54(06)2645-08 |
| 收稿时间： | 2004-01-31 |
Analysis of atom focusing for nanostructure fabrication with a completely off-resonant optical standing wave |
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| CHEN Xian-Zhong,Yao Han-Min,Chen Xu-Nan.Analysis of atom focusing for nanostructure fabrication with a completely off-resonant optical standing wave[J].Acta Physica Sinica,2005,54(6):2645-2652. |
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| Authors: | CHEN Xian-Zhong Yao Han-Min Chen Xu-Nan |
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| Abstract: | The focusing of a thermal atomic beam to nanometer_scale dimensions can be rea lized by a completely off_resonant standing_wave laser field, which can decrease the difficulty of atom lithography experiments. The effects of atom source on a tom focusing are analyzed using the Monte_Carlo scheme and trajectory tracing me thod, and the simulation results have shown that the effective size of the targe t has a much more important effect on feature width than beam spread and longitu dinal velocity spread. Several methods for improving experiments are presented. |
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| Keywords: | completely off_resonant standing_wave laser field atom focusing n anostructure fabrication |
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