Langmuir单探针诊断射频辉光放电等离子体及其数据处理

Langmuir探针是诊断等离子体参数的重要手段.报道了在氩气射顿(13.56MHz)辉光放电等离子体中使用调谐单探针进行诊断,对探针I-V特性曲线的统计噪声进行了数字滤波的光滑化处理,而后求二次微商.在相同的放电条件下,使用自行设计的微分电路,对探针特性二次微商进行在线测量.这两种方法得到的二次微商结果能够较好地符合. 关键词： Langmuir探针 二次微商 数值滤波 微分电路

DIAGNOSTIC OF RF PLASMA BY USING LANGMUIR PROBE AND ITS NUMERICAL PROCESSING

Langmuir probe is an important diagnostic tool for measuring plasma parameters. A tuned single probe has been used to diagnostic the electron energy distribution function in Ar radio frequency (13.56MHz) glow plasma. The second derivative of probe I-V characteristic was obtained after using numerical filter procedure to eliminate the statistical noise in measured I-V characteristic. A differential circuit has been designed and applied to measure the second derivative of I-V characteristic on line under the same discharge conditions. The results of the two methods are in agreement with each other.