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Problems on fabrication of computer-generated holograms for testing aspheric surfaces |
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| Authors: | Jun Ma Zhishan Gao Rihong Zhu Yong He Lei Chen Jianxin Li E Y B Pun W H Wong Lihui Huang Changqing Xie Xiaoli Zhu Jie Ma |
| Institution: | 1. Department of Optical Engineering, Nanjing University of Science and Technology, Nanjing 210094 2. Department of Electronic Engineering, City University of Hong Kong, Kowloon Tang, Hong Kong 3. Key Laboratory of Nano-Fabrication and Novel Devices Integrated Technology, Institute of Microelectronics,Chinese Academy of Sciences, Beijing 100029 |
| Abstract: | Interferometric optical testing using computer-generated hologram (CGH) can give highly accurate mea surement of aspheric surfaces has been proved. After the system is designed, a phase function is obtained according to the CGH's surface plane. For the requirement of accuracy, an optimization algorithm that transfers the phase function into a certain mask pattern file is presented in this letter, based on the rela tionship between the pattern error of CGH and the output wavefront accuracy. Then the writing machine is able to fabricate such a mask with this kind of file. With that mask, an improved procedure on fabri cation of phase type CGH is also presented. Interferometric test results of an aspheric surface show that the whole test system obtains the demanded accuracy. |
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