| Paired interference 3-dB coupler based on SOI rib waveguides with anisotropic chemical wet etching |
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| 作者姓名： | 李智勇 余金中 陈少武 刘敬伟 夏金松 |
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| 作者单位： | State Key Laboratory on Integrated Optoelectronics Institute of Semiconductors Chinese Academy of Sciences，State Key Laboratory on Integrated Optoelectronics Institute of Semiconductors Chinese Academy of Sciences，State Key Laboratory on Integrated Optoelectronics Institute of Semiconductors Chinese Academy of Sciences，State Key Laboratory on Integrated Optoelectronics Institute of Semiconductors Chinese Academy of Sciences，State Key Laboratory on Integrated Optoelectronics Institute of Semiconductors Chinese Academy of Sciences Belting 100083，Belting 100083，Belting 100083，Belting 100083，Belting 100083 |
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| 基金项目： | This work was supported in part by the National Natural Science Foundation of China (No.60336010)，the“973”Plan of China (No.G2000-03-66)，the“863”Program of China (No.2002AA312060). |
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| 摘 要： | A 3-dB paired interference (PI) optical coupler in silicon-on-insulator (SOI) based on rib waveguides with trapezoidal cross section was designed with simulation by a modified finite-difference beam propagation method (FD-BPM) and fabricated by potassium hydroxide (KOH) anisotropic chemical wet etching.The- oretically,tolerances of width,length,and port distance are more than 1,100,and 1μm,respectively. Smooth interface was obtained with the propagation loss of 1.1 dB/cm at the wavelength of 1.55μm.The coupler has a good uniformity of 0.2 dB and low excess loss of less than 2 dB.
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