| Uneven splitting-ratio 1×2 multimode interference splitters based on silicon wire waveguides |
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| 引用本文： | 周静涛,申华军,贾锐,刘焕明,汤益丹,杨成樾,薛春来,刘新宇.Uneven splitting-ratio 1×2 multimode interference splitters based on silicon wire waveguides[J].Chinese Optics Letters,2011(8):87-89. |
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| 作者姓名： | 周静涛 申华军 贾锐 刘焕明 汤益丹 杨成樾 薛春来 刘新宇 |
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| 作者单位： | Key Laboratory of Microelectronics Devices and Integrated Technology Institute of Microelectronics;Chinese Academy of Sciences;Institute of Semiconductors; |
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| 基金项目： | supported in part by the National Natural Science Foundation of China (No. 60977050); the National “973” Program of China (Nos. 2009CB320302 and 2011CB301704) |
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| 摘 要： | Two types of 1×2 multi-mode interference(MMI) splitters with splitting ratios of 85:15 and 72:28 are designed.On the basis of a numerical simulation,an optimal length of the MMI section is obtained.Subsequently,the devices are fabricated and tested.The footprints of the rectangular MMI regions are only 3×18.2 and 3×14.3(μm).The minimum excess losses are 1.4 and 1.1 dB.The results of the test on the splitting ratios are consistent with designed values.The devices can be applied in ultra-compact photonic integrated circuits to realize the "tap" function.
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