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Wavelength-selective switch based on a high fill-factor micromirror array
Authors:Sihua Li    Zhujun Wan  Jing Xu  Shaolong Zhong  Yaming Wu State Key Laboratory of Transducer Technology
Institution:Sihua Li 1,2,Zhujun Wan 3,Jing Xu 1,Shaolong Zhong 1,and Yaming Wu 1 1 State Key Laboratory of Transducer Technology,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China 2 Graduate University of Chinese Academy of Sciences,Beijing 100049,China 3 College of Optoelectronic Science and Engineering,Huazhong University of Science and Technology,Wuhan 430074,China
Abstract:A novel design and fabrication approach for a high fill-factor micro-electro-mechanical system(MEMS) micromirror array-based wavelength-selective switch(WSS) is presented. The WSS is composed of a polarization-independent transmission grating and a high fill-factor micromirror array. The WSS is suc-cessfully demonstrated based on the fabricated high fill-factor micromirror array. Test results show that the polarization-dependent loss(PDL) is less than 0.3 dB and that the insertion loss(IL) of the wavelength...
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