Institution: | Sihua Li 1,2,Zhujun Wan 3,Jing Xu 1,Shaolong Zhong 1,and Yaming Wu 1 1 State Key Laboratory of Transducer Technology,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China 2 Graduate University of Chinese Academy of Sciences,Beijing 100049,China 3 College of Optoelectronic Science and Engineering,Huazhong University of Science and Technology,Wuhan 430074,China |