| Influence of annealing temperature on the performance of Ge film and photon-counting imaging system |
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| 作者姓名： | 赵菲菲 赵宝升 赛小锋 张兴华 韦永林 邹玮 |
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| 作者单位： | [1]State Key Laboratory of Transient Optics and Photonics,Xi＇an Institute of Optics and Precision Mechanics, Chinese Academy of Sciences,Xi＇an 710119,China [2]Graduate University of Chinese Academy of Sciences,Beijing 100049,China |
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| 基金项目： | supported by the National Natural Science Foundation of China under Grant No.10878005 |
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| 摘 要： | <正>Compared with the traditional image intensifier with phosphor screen readout,the photon-counting imaging detector with charge induction readout is more beneficial in several aspects(e.g.,good imaging properties and time resolution) to astronomy,reconnaissance,bioluminescence,and materials research.However, the annealing temperature during the tube-making process can affect the properties of the Ge film,and consequently impair the performance of the detector.Therefore,the influence of annealing temperature on Ge film and on the detector is studied in order to determine the crucial parameters.The Ge films are prepared on ceramic and quartz glass by the use of an electron gun.They are analyzed by scanning electron microscope(SEM),high-resistance meter,and X-ray diffraction(XRD).The results show that the optimum substrate and annealing temperature are ceramic plate and 250℃,respectively.
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| 关 键 词： | 光子计数成像 成像性能 退火温度 锗薄膜 成像系统 扫描电子显微镜 锗探测器 影像增强器 |
Influence of annealing temperature on the performance of Ge film and photon-counting imaging system |
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| Feifei Zhao Baosheng Zhao Xiaofeng Sai Xinghua Zhang Yonglin Wei and Wei Zou.Influence of annealing temperature on the performance of Ge film and photon-counting imaging system[J].中国光学快报(英文版),2010(4):361-364. |
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| Authors: | Feifei Zhao Baosheng Zhao Xiaofeng Sai Xinghua Zhang Yonglin Wei and Wei Zou |
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| Institution: | Feifei Zhao Baosheng Zhao Xiaofeng Sai Xinghua Zhang Yonglin Wei and Wei Zou 1 State Key Laboratory of Transient Optics and Photonics,Xi＇an Institute of Optics and Precision Mechanics, Chinese Academy of Sciences,Xi＇an 710119,China 2 Graduate University of Chinese Academy of Sciences,Beijing 100049,China |
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