Qualification of superpolished substrates for laser-gyro by surface integrated scatter measurement |
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| Authors: | Zhimeng Wei Xingwu Long Kaiyong Yang College of Optoelectric Science Engineering National University of Defense Technology Changsha China |
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| Institution: | Zhimeng Wei~*,Xingwu Long,, Kaiyong Yang College of Optoelectric Science , Engineering,National University of Defense Technology,Changsha 410073,China |
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| Abstract: | Integrated scatterometer for qualification of superpolished substrates for laser-gyro by surface scatter loss measurement is constructed.Different from the qualification of substrate by surface roughness,the scatterometer measures the forward surface scatter loss to check whether the mirror made of the substrate will be suitable for the required laser-gyro lock-in specification.The scatterometer utilizes convex lens instead of integrating sphere to collect scatter light.Special sample support and baffle are... |
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