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Design of chirped Mo/Si multilayer mirror in the extreme ultraviolet region
Authors:Rui Chen  Fengli Wang  Zhanshan Wang
Abstract:The chirped Mo/Si multilayer mirror in the extreme ultraviolet region is designed to obtain sub-femtosecond pulses from high-order harmonics. Numerical simulations of temporal profile of the pulses are made for superposition of incident high-order harmonics and that of reflected ones by the chirped multilayer mirror.The normal incidence reflectivity and chirp in the wavelength range of 12.5 - 16.5 nm are 6.7% ±0.5%and-3617±171 as2, respectively. Simulation results indicate that the designed chirped multilayer mirror can be used for producing 104-as pulses.
Keywords:Design  region  extreme  Simulation  results  used  producing  normal  incidence  reflectivity  chirp  range  Numerical  simulations  temporal profile  superposition  multilayer mirror  harmonics
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