| ZrO_2 films with variable refractive index by glancing angle deposition |
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| 作者姓名： | 傅小勇 王素梅 邓德刚 易葵 邵建达 范正修 |
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| 作者单位： | Shanghai Institute of Optics and Fine Mechanics Chinese Academy of Sciences Shanghai 201800 Graduate School of the Chinese Academy of Sciences，Beijing 100039，Shanghai Institute of Optics and Fine Mechanics Chinese Academy of Sciences，Shanghai 201800 Graduate School of the Chinese Academy of Sciences，Beijing 100039，Shanghai Institute of Optics and Fine Mechanics Chinese Academy of Sciences，Shanghai 201800 Graduate School of the Chinese Academy of Sciences，Beijing 100039，Shanghai Institute of Optics and Fine Mechanics Chinese Academy of Sciences，Shanghai 201800，Shanghai Institute of Optics and Fine Mechanics Chinese Academy of Sciences，Shanghai 201800，Shanghai Institute of Optics and Fine Mechanics Chinese Academy of Sciences，Shanghai 201800 |
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| 摘 要： | When optical film is deposited at oblique angle incidences, the film becomes porously, and the film effective refractive index will decrease. Six porous ZrO2 films are fabricated by the glancing angle deposition (GLAD) technique with the different incidence angles. By changing the substrate tilt angle from 0° to 85°. the film refractive index varies from 1.92 to 1.27.
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