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B_4C/Mo/Si high reflectivity multilayer mirror at 30.4 nm
作者姓名:王占山  张淑敏  吴文娟  朱京涛  王洪昌  李存霞  徐垚  王风丽  张众  陈玲燕  周洪军  霍同林
作者单位:Institute of Precision Optical Engineering Physics Department,Tongji University,Shanghai 200092,Institute of Precision Optical Engineering,Physics Department,Tongji University,Shanghai 200092,Institute of Precision Optical Engineering,Physics Department,Tongji University,Shanghai 200092,Institute of Precision Optical Engineering,Physics Department,Tongji University,Shanghai 200092,Institute of Precision Optical Engineering Physics Department Tongji University Shanghai 200092,Institute of Precision Optical Engineering Physics Department Tongji University Shanghai 200092,Institute of Precision Optical Engineering Physics Department Tongji University Shanghai 200092,Institute of Precision Optical Engineering Physics Department Tongji University Shanghai 200092,Institute of Precision Optical Engineering Physics Department Tongji University Shanghai 200092,Institute of Precision Optical Engineering Physics Department Tongji University Shanghai 200092,National Synchrotron Radiation Laboratory,University of Science and Technology of China,Hefei 230029,National Synchrotron Radiation Laboratory,University of Science and Technology of China,Hefei 230029
基金项目:This work was supported by the National Natural Science Foundation of China (No. 60378021 and 10435050) the Program for New Century Excellent Talents in University (No. NCET-04-0376) the Science Fund of Tongji University.
摘    要:The B4C/Mo/Si high reflectivity multilayer mirror was designed for He-Ⅱradiation (30.4 nm) using the layer-by-layer method. The theoretical peak reflectivity was up to 38.2% at the incident angle of 5℃. The B4C/Mo/Si multilayer was fabricated by direct current magnetron sputtering and measured at the National Synchrotron Radiation Laboratory (NSRL) of China. The experimental reflectivity of the B4C/Mo/Si multilayer at 30.4 nm was about 32.5%. The promising performances of the B4C/Mo/Si multilayer mirror could be used for the construction of solar physics instrumentation.

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