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Study of Nanocrystalline Diamond Film Deposited Rapidly by 500 W Excimer Laser |
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| Authors: | PENG Hongyan SHEN Jiajing YANG Guilong |
| Abstract: | High quality nanocrystalline diamond film deposited rapidly by an XeCl excimer laser operated at high laser power (500 W) and repetition rate (300～500 Hz) is presented. A high deposition rate, 250 nm/thousand pulses, was obtained. The effects of laser energy fluence and repetition rate on the deposition of diamond film were investigated. |
| Keywords: | pulser laser deposition nanocrystalline diamond film laser energy fluence |
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