Homodyne full-field interferometer for measuring dynamic surface phenomena in microstructures |
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| Institution: | 1. Institute of Modern Optics, Department of Physics, Harbin Institute of Technology, Harbin, 150001, China;2. Key Laboratory of Micro-Optics and Photonics Technology of Heilongjiang Province, Harbin, 150001, China;1. School of Electronic Information Engineering, Tianjin University, Tianjin, 300072 PR China;2. State Key Laboratory of Structural Analysis for Industrial Equipment, Dalian University of Technology, Dalian, 116024 PR China;1. State Key Laboratory of Information Photonics & Optical Communications, Beijing University of Posts & Telecom, Beijing 100876, China;2. ZTE Corporation, China;1. State Key Laboratory of Tribology, Department of Mechanical Engineering, Tsinghua University, Beijing, 100084 China;2. Beijing Advanced Innovation Center for Imaging Technology, Capital Normal University, Beijing, 100048 China;3. School of Mechanical Engineering, Purdue University, West Lafayette, IN, 47907 USA;4. Ingram School of Engineering, Texas State University, San Marcos, TX, 78746 USA |
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| Abstract: | We describe a stabilized homodyne full-field interferometer capable of measuring vertical surface deformations of microstructures in the time domain. The interferometer is stabilized to a chosen operation point by obtaining a feedback signal from a non-moving, freely selectable, reference region on the sample surface. The stabilized full-field interferometer enables detection of time-dependent changes in the surface profile with nanometer scale vertical resolution, while the temporal resolution of the measurement is ultimately limited by the refresh rate of the camera only. The lateral resolution of the surface deformation is determined by the combination of the imaging optics together with the pixel size of the camera. The setup is used to measure the deformation of an Aluminum nitride membrane as a function of time-dependent pressure change. The data analysis allows for unambiguous determination of surface deformations over multiple fringes of the interferogram, hence enabling the study of a wide range of physical phenomena with varying magnitude of vertical surface movement. |
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| Keywords: | Full-field interferometry Homodyne stabilized Micromechanics Dynamic behavior Surface deformation Time domain |
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