Review of surface profile measurement techniques based on optical interferometry |
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| Institution: | 1. Department of Precision Mechanical Engineering, Shanghai University, Shanghai 200072, China;2. School of Mechanical and Aerospace Engineering, Nanyang Technological University, Singapore 639798, Singapore;3. Department of Physics, Chemistry, and Biology, Linköping University, Linköping SE-58183, Sweden;1. School of Information Science and Engineering and Shandong Provincial Key Laboratory of Laser Technology and Application, Shandong University, Jinan 250100, China;2. Environment Research Institute, Shandong University, Jinan, Shandong, Qingdao 266237, China;3. Department of Physics, College of Science, Jiangsu University of Science and Technology, 2 Mengxi Road, Zhenjiang, Jiangsu 212003, China |
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| Abstract: | With the fast development of modern science and technology, two or three-dimensional surface profile measurement techniques with high resolution and large dynamic range are urgently required. Among them, the techniques based on optical interferometry have been widely used for their good properties of non-contact, high resolution, large dynamic measurement range and well-defined traceability route to the definition of meter. A review focused on surface profile measurement techniques of optical interferometry is introduced in this paper with a detailed classification sorted by operating principles. Examples in each category are discussed and analyzed for better understanding. |
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| Keywords: | Surface profile measurement Optical interferometry |
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