Common path interferometer based on the modified Michelson configuration using a reflective grating |
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| Institution: | 1. Research Institute “Polus”, Vvedenskogo str., 3-1, 117342 Moscow, Russia;2. Lomonosov Moscow State University, Dept. of Physics, Leninskiye Gory, 119991 Moscow, Russia;1. School of Software Engineering, Xi’an Jiaotong University, No.28, Xianning West Road, Xi’an, Shaanxi, 710049, PR China;2. Institute of Artificial Intelligence and Robotics, Xi’an Jiaotong University, No.28, Xianning West Road, Xi’an, Shaanxi, 710049, PR China;3. Engineering University of PAP, Xi’an, Shaanxi, 710086, PR China;1. Department of Optometry, Eulji University, 553, Sanseong-daero, Sujeong-gu, Seongnam-si, Gyonggi-do, South Korea;2. Department of Electrical, Electronic, and Control Engineering, IITC, Hankyong National University, Gyonggi-do 456-749, South Korea;1. School of Computer Science and Engineering, Xi’an University of Technology, Xi’an 710048, China;2. Science and Technology department, Xi’an University of Technology, Xi’an 710048, China;3. School of Automation and Information, Xi?an University of Technology, Xi’an 710048, China;1. CEA-Leti, 17 Avenue des Martyrs, 38054 Grenoble, France;2. Univ. Grenoble Alpes, GIPSA-Lab, F-38000 Grenoble, France |
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| Abstract: | A common-path interferometer using the modified Michelson system with a reflective grating is proposed for quantitative phase imaging. The frequency spectrum of the object beam is split into two beams using a beam splitter. One beam is diffracted into +1, 0, and ?1 orders by the reflective grating to act as an object beam, and the other beam is low-filtered and diffracted by a pinhole mirror to act as a reference beam. Three phase-shifted interferograms can be simultaneously captured using the proposed interferometer, and the specimen phase can then be reconstructed from the three interferograms. Experiments are carried out to prove the precision, real-time ability, and stability of the proposed method. |
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| Keywords: | Interferometry Phase measurement Diffraction grating Phase shift Gratings |
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