Design, optimisation and predicted performance of a micro-machined IR sensor that exploits the squeeze film damping effect to measure cantilever beam displacement期刊界 All Journals 搜尽天下杂志传播学术成果专业期刊搜索期刊信息化学术搜索

按检索

Design, optimisation and predicted performance of a micro-machined IR sensor that exploits the squeeze film damping effect to measure cantilever beam displacement

Authors:	PD Smith CR Chatwin RCD Young

Institution:	^aSchool of Science and Technology, University of Sussex, Falmer, Brighton, BN1 9QT, UK

Abstract:

Keywords:	MEMS Infrared Squeeze-film damping Micro-structure
本文献已被 ScienceDirect 等数据库收录！