Characteristics of VHF H2 Plasma Produced at High Pressure |
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| Authors: | Y Yamauchi Y Takeuchi H Takatsuka H Yamashita H Muta Y Kawai |
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| Institution: | 1. Nagasaki Shipyard & Machinery Works, Mitsubishi Heavy Industries Ltd., Isahaya, Nagasaki, 854‐0065, Japan;2. Nagasaki Research & Development Center, Mitsubishi Heavy Industries Ltd., Mitsubishi Heavy Industries Ltd., Fukahori, Nagasaki, 851‐0392, Japan;3. Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, Kasuga, Fukuoka 816‐8580, Japan;4. Research Institute for Applied Mechanics, Kyushu University, Kasugakoen 6‐1, Fukuoka 816‐8580, Japan |
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| Abstract: | A VHF H2 plasma was produced with the multi rod electrode at high pressure and the plasma parameters were measured as a function of pressure for different VHF powers at 60 MHz. It was found that when the pressure is increased, the ion saturation current peaks at certain pressure and finally decreases at high pressures, while the electron temperature is around 10 eV. The wall potential at high pressure was lower than the values estimated from the electron temperature using the probe theory. Furthermore, the anomalous reduction of the electron saturation current was observed. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim) |
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| Keywords: | VHF plasma high pressure H2 plasma plasma parameter multi‐rod electrode wall potential |
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