Partial Cross Sections for Dissoziative Ionization of Fluorinated Compounds by Electron Impact

Ionization cross sections of fragment ions of CF₄, C₂F₆, C₃F₈, n-C₄F₁₀, C₂F₄, 1-C₄F₈, SiF₄, COF₂. CHF₃ were determined in dependence on electron energy up to 125 eV by means of a quadrupol mass spectrometer. Tails at the low energy part of the characteristics are interpreted as a result of kinetic energy depending on molecular weight of fragments. Parent ions are only detected for chemically unsaturated compounds showing characteristic curves of ionization efficiency. Total cross sections obey the additive rule.