| 真空变温薄膜电阻测试仪器的设计与应用 |
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| 引用本文： | 朱亚彬,魏敏建,何帆,刘依真,王保军,陈志杰.真空变温薄膜电阻测试仪器的设计与应用[J].物理实验,2011,31(1):28-30,33. |
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| 作者姓名： | 朱亚彬 魏敏建 何帆 刘依真 王保军 陈志杰 |
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| 作者单位： | 北京交通大学,理学院,物理实验中心,北京,100044 |
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| 摘 要： | 设计了自制真空变温薄膜电阻测试仪器,可以实现粗真空条件下,从室温到300℃的四探针法薄膜电阻测试.该仪器适用于开展薄膜物性与电阻和温度相关的实验,例如,金属与半导体薄膜的温度-电阻特性实验,二氧化钒薄膜热滞效应实验等.
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| 关 键 词： | 真空 变温 薄膜电阻 |
New instrument for measuring thin film resistance with varying temperature in vacuum |
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| ZHU Ya-bin,WEI Min-jian,HE Fan,LIU Yi-zhen,WANG Bao-jun,CHEN Zhi-jie.New instrument for measuring thin film resistance with varying temperature in vacuum[J].Physics Experimentation,2011,31(1):28-30,33. |
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| Authors: | ZHU Ya-bin WEI Min-jian HE Fan LIU Yi-zhen WANG Bao-jun CHEN Zhi-jie |
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| Institution: | ZHU Ya-bin,WEI Min-jian,HE Fan,LIU Yi-zhen,WANG Bao-jun,CHEN Zhi-jie(School of Science,Beijing Jiaotong University,Beijing 100044,China) |
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| Abstract: | New self-made instrument for measuring thin film resistance using four-probe method with varying temperature(from room temperature to 300 ℃) under rough vacuum was introduced.It was suitable for the development of physics experiments on properties related to the temperature-dependent resistance,for example,the resistance v.s.temperature characteristic of metal and semiconductor thin film and thermal-lag effect of vanadium dioxide thin film,and so on. |
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| Keywords: | vacuum varying temperature thin film resistance |
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