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射频等离子体辅助MBE生长GaN及Mg掺杂的光致发光
引用本文:隋妍萍,于广辉,孟胜,雷本亮,王笑龙,王新中,齐鸣.射频等离子体辅助MBE生长GaN及Mg掺杂的光致发光[J].发光学报,2006,27(6):971-975.
作者姓名:隋妍萍  于广辉  孟胜  雷本亮  王笑龙  王新中  齐鸣
作者单位:中国科学院上海微系统与信息技术研究所, 信息功能材料国家重点实验室, 上海, 200050
基金项目:中法国际合作项目CNRS/ASC2005(18152),国家“863”计划(2002AA305304),上海市自然科学基金(05ZR14139),国际合作项目(055207043)资助项目
摘    要:采用射频等离子体辅助分子束外延(RF plasma-assisted MBE)系统生长非故意掺杂GaN和p型GaN,并且通过室温和低温光致发光(PL)谱测试研究了材料的发光特性及与杂质态的关系,对于GaN外延层出现的黄带发光进行分析。结果表明,富Ga条件下生长的GaN材料特性要优于富N生长的材料;非故意掺杂的富Ga样品中出现的黄带发光(YL)与GaN中生成能最低的氮空位(VN)缺陷有关;不同的Mg掺杂浓度对样品的PL特性有较大的影响;结合Hall效应测量结果,认为在Mg重掺杂的样品中出现的黄带发光,与GaN的自补偿效应以及重掺杂导致的晶体质量下降有关。

关 键 词:分子束外延  Ⅲ/Ⅴ比  PL谱  黄带发光
文章编号:1000-7032(2006)06-0971-05
收稿时间:2006-03-06
修稿时间:2006-06-24

Photoluminescence Lines in Unintentionally Doped and Mg-doped GaN Grown by Plasma-assisted Molecular Beam Epitaxy
SUI Yan-ping,YU Guang-hui,MENG Sheng,LEI Ben-liang,WANG Xiao-long,WANG Xin-zhong,QI Ming.Photoluminescence Lines in Unintentionally Doped and Mg-doped GaN Grown by Plasma-assisted Molecular Beam Epitaxy[J].Chinese Journal of Luminescence,2006,27(6):971-975.
Authors:SUI Yan-ping  YU Guang-hui  MENG Sheng  LEI Ben-liang  WANG Xiao-long  WANG Xin-zhong  QI Ming
Institution:State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
Abstract:The optical properties of GaN-based materials are essential to the optoelectronic devices such as light emitting diodes and laser diodes in visible and ultraviolet regions. In this work unintentionally doped GaNand Mg-doped p-GaN were grown on sapphire substrates by plasma-assisted molecular beam epitaxy (PA-MBE ). The photoluminescence (PL) characteristics were studied by means of RT and low-temperature PLspectra with λex=325 nm. The electrical properties of GaN:Mg were tested by Hall measurement. We especially studied the yellow luminescence (YL) observed in PLspectra in view of the difference between these two types of GaN. In as much as the exciton peaks of Ga-rich GaN exhibit a narrower FWHM than N-rich GaN, it is indicated that material quality of the former is better than the latter. The YLin Ga-rich GaNis related to point defects which is correlative with nitrogen vacancies. Mg doping concentration has a great effect on PLcharacteristics of p-GaN. The p-type samples show three shapes of PLlines with Mg-doping temperature varying. Hall measurements show that hole concentration of p-type GaNis increased up to a upper limit and then decreased along with the increasing of Mg doping temperature. In combination with the results of hall test, we proposed that the YLin highly Mg-doped GaNcould be attributed to self-compensation effect and the decrease of crystal quality caused by highly Mg doping. Through the study, we found that the YLoriginates from different sources by comparing the undoped GaN and Mg-doped GaN, and it also correlates with the material qualities commonly.
Keywords:MBE  Ⅲ/Ⅴ ratio  PL spectra  yellow luminescence
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