脉冲LD泵浦电光调Q深紫外激光器

研制了千赫兹213 nm深紫外全固态激光器。激光器采用脉冲LD侧面泵浦方式和电光调Q技术,实现了10瓦级基频光的稳定输出。利用多次倍频技术,实现了稳定的213 nm深紫外激光输出。当LD泵浦电流为80 A时,213 nm激光输出的最大平均功率达到了151 m W,激光器重复频率为1 k Hz,激光脉冲宽度为10ns,功率不稳定度为3%。同时,对激光在非线性晶体中的偏振匹配和不同重复频率条件下的激光器运转特性进行了分析。

Pulse LD Pumped EO-Q Switched DUV Laser

A kHz 213 nm DUV solid-state-laser was developed adopting LD side-pumping configura-tion and electro-optical Q-switched techniques. A fundamental frequency radiation with the output power of 10 W was presented. The laser system could operate stably at the wavelength of 213 nm using multiple frequency techniques. When the pumping current of LD is 80 A, the maximum aver-age output power of 213 nm beam arrives at 151 mW with the repetition rate of 1 kHz, the pulse width of 10 ns, and the power instability of 3%. Then, the polarization matching of the laser beam in the nonlinear crystal was analyzed. Furthermore, the operation properties of the laser system were studied detailedly under different repetition rates.