| 激光化学微加工技术 |
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| 引用本文： | 郑永成.激光化学微加工技术[J].发光学报,1983,4(1):65-74. |
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| 作者姓名： | 郑永成 |
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| 作者单位： | 中国科学院长春物理研究所 |
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| 摘 要： | 本文综述了激光化学微加工技术的原理及某些特性,并指出其可能的应用及发展前景.
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LASER PHOTOCHEMICAL TECHNIQUES FOR USE IN THE MICROMETER-SIZED PROCESSING |
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| Zheng Yong-cheng.LASER PHOTOCHEMICAL TECHNIQUES FOR USE IN THE MICROMETER-SIZED PROCESSING[J].Chinese Journal of Luminescence,1983,4(1):65-74. |
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| Authors: | Zheng Yong-cheng |
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| Institution: | Changchun Institute of Physics, Academia Sinica |
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| Abstract: | The author gives a review on the principle and some characteristics of laser photochemical techniques for use in the micrometer-sized processing, and presents possible applications of the techniques to microelectronics and their developments in the future. |
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