Generalized method for wave-front analysis |
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Authors: | Wolfling Shay Ben-Yosef Nissim Arieli Yoel |
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Institution: | Nano-Or Technologies, Yodfat 1, Lod 71291, Israel. shayw@nano-or.com |
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Abstract: | We suggest and demonstrate a new method for wave-front analysis based on common-path phase-shift interferometry. We introduce a formalism and an iterative mathematical algorithm in which the wave front is transformed, modified, and inversely transformed. The resulting intensity data are sufficient to reconstruct the entire wave front. In a more restricted case, in which the wave-front modifications are arbitrarily applied over arbitrary spatial regions of the wave front, the wave front is reconstructed semianalytically by use of a model that allows a local solution, followed by an iterative algorithm. Measurement results indicating that the suggested approach has an improved measurement accuracy with respect to existing quantitative phase measurement methods are presented. |
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