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High quality YBCO superconductive thin films fabricated by laser molecular beam epitaxy
Authors:CHEN Fan  LB Huibin  ZHAO Tong  WANG Rongping  ZHOU Yueliang  CHEN Zhenghao  YANG Guozhen
Institution:Laboratory of Optical Physics,Institute of Physics,Center for Condensed Matter Physics,Chinese Academy of Sciences,
Abstract:High quality YBa2.Cu3O6 +x(YBCO) superconductive thin films have been fabricated on the SrTiO3(100) substrate using laser molecular beam epitaxy (laser-MBE). The active oxygen source was used, which made the necessary ambient oxygen pressure be 2–3 orders lower than that in pulsed laser deposition (PLD). Tc0 is 85–87 K, and Jc, 1.0 × 106 A/cm2. Atomic force microscopy (AFM) measurements show that no obvious particulates can be observed and the root mean square roughness is 7.8 nm. High stability DC superconducting quantum interference devices (DC-SQUID) was fabricated using this YBCO thin film.
Keywords:YBCO superconductive thin film  Laser molecular beam epitaxy  Active gas  Root mean square roughness  Particulate
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