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Atomic scale epitaxial growth of BaTiO3 thin films by laser molecular beam epitaxy
Authors:Huisheng Wang  Kun Ma  Yanwei Liu  Zhiqiang Peng  Dafu Cui  Huibin Lu  Yueliang Zhou  Zhenghao Chen  Lin Li  Guozhen Yang
Institution:(1) Laboratory-of Optical Physics, Institute of Physics and Center for Condensed Matter Physics, Chinese Academy of Sciences, 100080 Beijing, China;(2) National Laboratory for Superconductivity and Center for Condensed Matter Physics, Chinese Academy of Sciences, 100080 Beijing, China
Abstract:By using laser molecular beam epitaxy (L-MBE), atomic scale epitaxid growth of BaTiO3(BTO) thin films on SrTiO3 (STO) substrates is achieved. Measurements of reflection high energy electron diffraction (RHEED), X-ray diffraction (XRD), scanning electron microscopy, and transmission electron microscopy reveal that the BTO films arec-axis oriented single crystals with smooth surface. The multi-layer ferroelectric/superconducting heterostructures are also prepared and the ferroelectric properties of BTO films are studied. The results show that by using L-MBE technique, high quality BTO films and improved device performance can be obtained. Project supported by the National Natural Science Foundation of China, the National Department of Finance, and the National Center for R and D on Superconductivity of China.
Keywords:laser molecular beam epitaxy  BaTiO3 thin films  structural analysis  ferraelectric properties
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