用正交试验方法优化IC工艺条件

本文用正交试验方法，对某种汽国专用ＩＣ工艺进行试验，找到良好的工艺条件．在做重复性试验之后，用单因素方差分析方法，找到最佳工艺条件．并从理论上分析器件参数随工艺条件变化的规律．使该电路在大批量生产过程中，成品率提高３０％以上，产生了较大的经济效益．

Use Cross Test Methods to Optimize IC Process Conditions

It is described that a sort of special automobile IC process is tested and better process conditions are found with cross test methods. The best process conditions is found with single-factor square-erroranalysis method after repetitiveness test. The laws of device parameters varing with process conditions are studied in theory. The yield of he IC has increased more than 30 % during mass-produce, and good economic benefitis gained.