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Fabrication of microstructures on paraffin substrate using laser heating
Authors:C.-A. Lee  N. Tsukada  T. Nakao  T. Higuchi
Affiliation:(1) Department of Precision Engineering, The University of Tokyo, 7-3-1, Hongo, Bunkyo-ku, Tokyo 113-8656, Japan
Abstract:In this paper, a technique of forming convex microstructures on a paraffin substrate using laser heating is described. This technique makes use of a phenomenon that solid paraffin, melted by continuous laser irradiation, grows into a pillar-shaped structure with a high aspect ratio in a liquid. Two-dimensional structures, such as line- and wall-shaped structures, are available by scanning irradiation. Also, it is possible to fabricate oblique structures with an inclined laser irradiation. In addition, some characteristics of this fabrication method, such as the laser power and the material temperature, are investigated. Furthermore, the mechanism of this fabrication method is presented. PACS 07.10.Cm; 47.55.Pf; 65.40.De; 79.20.Ds; 81.05.-t
Keywords:
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