溶剂热法制备Al掺杂ZnO薄膜的机理研究

采用溶剂热法在玻璃衬底上制备Al掺杂的ZnO薄膜,研究了溶剂热过程中升温、恒温和降温三个阶段分别对薄膜物相和形貌的影响,探讨了薄膜的生长机理.结果表明,升温阶段只是形核过程,基片仅在升温阶段与前驱液接触不能形成薄膜；基片在升温-恒温阶段与前驱液接触可制备(002)择优取向的薄膜；恒温阶段既有成核过程又有晶体生长过程,基片仅在恒温阶段与前驱液接触可以制备薄膜；降温阶段薄膜继续生长.

Study on Growth Mechanism of Al Doped ZnO Films Prepared by Solvothermal Method

Aluminum doped zinc oxide(AZO) films were prepared by solvothermal method on glass substrates.The effects of heating,temperature holding and cooling stages on the phase and morphology of AZO films were investigated.The growth mechanism of AZO films was studied.The results indicated that only nucleation takes place at heating stage.There was no film deposited when the substrates contacted with precursor only at heating stage.AZO films obtained on the substrates contacting with precursor at both heating and temperature holding stages show(002) preferred orientation.Both nucleation and crystal growth take place at temperature holding stage.AZO films can be deposited on the substrates contacting with precursor only at temperature holding stage.AZO films continue slowly to grow at cooling stage.