高增透的类金刚石碳膜的红外吸收特性研究

利用射频等离子体分解甲烷的技术在锗片上沉积了非晶结构的类金刚石碳膜，傅里叶红外光谱仪测量显示镀覆的类金刚石碳膜的锗片在红外范围内具有高增透作用，特别在１７４０～！２０４４ｃｍ＾－１其峰值透过率高达９９％，在９４５．７ｃｍ＾－１（１０．６ｕｍ）处透过率为９４．５％。利用实测的液内的吸收系数接近于０，在１０．６ｕｍ的吸收系数为２３０ｃｍ＾－１，膜主要由ｓｐ＾３的Ｃ＿Ｈ键结构组成，各吸收峰均得到了很好的

Infrared Absorption Characterization of Diamond-Like Carbon Films

Diamond-like carbon (DLC) i.e.amorphous carbon films were grown on germanium (Ge) substrates by rf-plasma decomposition of methane.Fourier transform infrared (FTIR) spectroscopy measurement showed that the DLC films acted as the anti-reflect coatings of Ge substrates,especially,maxima of the transmission of DLC/Ge/DLC were above 99% from 1740 cm-1 to 2044 cm-1,94.5% at 945.7 cm-1(10.6 μm).IR transmission spectroscopy and improved transmission formula were used to calculate the absorption coefficient of DLC films from 2.5 μm to 12 μm.The results indicated that the absorption coefficient of the films approached 0 ranging from 1700 cm-1 to 2600 cm-1 and 230 cm-1 at 945.7 cm-1.The sp3 C-H bonds were dominate in the DLC films.All the absorption peaks were well explained by bonds.