Z切LiNbO3晶体中退火质子交换光波导特性的研究

系统地研究Ｚ切ＬｉＮｂＯ３晶体中质子交换波导和退火质子交换波导的特性，得到了质子交换过程中的扩散常数和激活能。发现了质子交换波导的折射率呈线性阶跃型的折射率分布。通过连续退火，波导的折射率分布由线性阶跃型向高斯型过渡。退火可分为两个阶段，波导深度的增加在第一阶段随退火时间成指数关系，第二阶段与退火时间的平方根成线性关系。

Characterization of Annealed Proton Exchanged Optical Waveguides in Z-Cut LiNbO3

The result of a systematic study on planar waveguides fabricated in z-cut LiNbO3 by proton exchange and the post-annea ling is reported. The diffusion constant and the activation energy can be deduc ed from the proton exchange process. It was found that index profile of the as -exc hanged wavegudies is a linear step profile. The index profile changes from step -like to Gaussian profile with succesive annealing. The annealing depth increase s exponentially with annealing time at the first stage and then increases linearly with the square root of annealing time at the second stage of annealing.