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| Al/AlN多层膜的摩擦磨损性能研究 | |
| 引用本文： | 张广安,吴志国,王明旭,范晓彦,王君,闫鹏勋.Al/AlN多层膜的摩擦磨损性能研究[J].摩擦学学报,2007,27(3):204-209. |
| 作者姓名： | 张广安 吴志国 王明旭 范晓彦 王君 闫鹏勋 |
| 作者单位： | 1. 兰州大学,等离子体与金属材料研究所,甘肃,兰州,730000 2. 兰州大学,等离子体与金属材料研究所,甘肃,兰州,730000;兰州理工大学,甘肃省省部共建有色金属新材料国家重点实验室,甘肃,兰州,730050 3. 兰州大学,等离子体与金属材料研究所,甘肃,兰州,730000;中国科学院兰州化学物理研究所,固体润滑国家重点实验室,甘肃,兰州,730000 |
| 基金项目： | 甘肃兰州理工大学有色金属新材料国家重点实验室(培育基地)开放课题，国家自然科学基金 |
| 摘 要： | 采用柱状靶磁控溅射系统制备Al/AlN纳米多层膜,采用纳米压痕仪测量Al/AlN纳米多层膜的纳米硬度,在UMT-2M型摩擦磨损试验机上评价其摩擦磨损性能.结果表明:当AlN层较厚时,薄膜在很短时间内被磨穿;调节Al/AlN层厚比为2.9/1.1时,薄膜的摩擦磨损性能明显提高;当保持Al/AlN层厚比为2.9/1.1、变化多层膜的调制周期时,薄膜的摩擦系数较低,但硬度较低的薄膜由于承载能力不够,不能够保持优良的摩擦磨损性能. |
| 关 键 词： | 磁控溅射 Al/AlN多层膜 摩擦磨损性能 |
| 文章编号： | 1004-0595（2007）03-0204-06 |
| 收稿时间： | 6/6/2006 12:00:00 AM |
| 修稿时间： | 2006-06-062006-10-16 |
Study on Tribological Behavior of Al/AlN Multilayers |
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| ZHANG Guang-an,WU Zhi-guo,WANG Ming-xu,FAN Xiao-yan,WANG Jun,YAN Peng-xun.Study on Tribological Behavior of Al/AlN Multilayers[J].Tribology,2007,27(3):204-209. | |
| Authors: | ZHANG Guang-an WU Zhi-guo WANG Ming-xu FAN Xiao-yan WANG Jun YAN Peng-xun |
| Institution: | 1. Institute for Plasma and Metal Materials, Lanzhou University, Lanzhou 730000, China; 2. State Key Laboratory of New Nonferrous Metal Materials, Lanzhou University of Technology,Lanzhou 730050, China; 3. State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China |
| Abstract: | Al/AIN muhilayers were prepared by cylindrical DC magnetron sputtering method. The hardness of the Al/AIN multilayer films was determined using a nano-indentation tester. The wear properties of the films were measured by a UMT-2MT tester in reciprocating mode. The tribological properties of the Al/AIN multilayers showed obvious enhancement in the Al/AIN layer thickness ratio of 2.9/1.1 compared to the thick AIN layer in modulation period. With the same Al/AIN layer thickness ratio but varying modulation period, the film exhibited low friction coefficient, but it also exhibited poor tribological performance at high load due to its low hardness. |
| Keywords: | magnetron sputtering Al/AIN multilayer friction and wear behavior |
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