Microcalorimeter Detectors and Low Voltage SEM Microanalysis |
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Authors: | Edward A Kenik David C Joy Del Redfern |
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Institution: | (1) Metals and Ceramics Division, Oak Ridge National Laboratory, 37831-6064 Oak Ridge, TN, USA;(2) Electron Microscopy Facility, University of Tennessee, 37996-0840 Knoxville, TN, USA;(3) EDAX Inc., 07430 Mahwah, NJ, USA |
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Abstract: | The development of the microcalorimeter energy-dispersive X-ray spectrometer (µ-cal EDS) offers a significant advancement in X-ray microanalysis, especially for electron beam instruments. The benefits are especially pronounced for low voltage (5kV) X-ray microanalysis in the field emission scanning electron microscope (FE-SEM) where the high energy resolution of the µ-cal EDS minimizes the peak overlaps among the myriad of K, L, M and N lines in the 0–5keV energy range. The availability of L- and M-shell X-ray lines for microanalysis somewhat offsets the absence of X-ray lines traditionally used above 5keV energy. The benefits and challenges of the µ-cal EDS will be discussed, including P/B ratio for characteristic X-rays, collection angle, count rate capability and the impact of polycapillary X-ray optics on microanalysis. |
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Keywords: | : Energy-dispersive X-ray spectrometry microcalorimeter low voltage X-ray microanalysis scanning electron microscopy |
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