An experimental study of the plasma parameters of a hybrid low-pressure RF discharge |
| |
Authors: | K V Vavilin M A Gomorev E A Kralkina P A Nekludova V B Pavlov Chen Zhao |
| |
Institution: | 1.Faculty of Physics,Moscow State University,Moscow,Russia |
| |
Abstract: | This paper presents an experimental study of the plasma parameters of a hybrid radio-frequency (RF) discharge, which is a
new modification of an RF discharge. The discharge is maintained by both vortex and potential RF electrical fields. To generate
a hybrid RF discharge, an RF power input unit is used in the form of a parallel-connected inductor and capacitor coatings.
A blocking capacitor is included in the capacitive channel of the discharge. The paper presents data from the study of the
influence of power coupled to the plasma, argon pressure, and blocking capacitance on the plasma parameters, i.e., the electron
energy distribution, temperature, and density and plasma potential. The role of the capacitive channel in the variations in
properties and the characteristics of the discharge are considered. |
| |
Keywords: | |
本文献已被 SpringerLink 等数据库收录! |
|