(1) Department of Laser Chemistry, Department of Analytical Chemistry, Russia;(2) Nesmeyanov Institute of Organoelement Compounds, Russian Academy of Sciences, ul. Vavilova 28, Moscow, 119991, Russia
Abstract:
Carbon nitride films have been synthesized by double-pulse laser ablation of graphite in nitrogen plasma. The films produced in both single-and double-pulse experiments have been studied by X-ray photoelectron spectroscopy and X-ray diffraction. The degree of crystallinity and the content of sp3-hybridized carbon atoms in the films obtained by double-pulse laser ablation turn out to be higher than in the films deposited by the conventional one-pulse method.