Verification of evanescent coupling from subwavelength grating pairs |
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Authors: | A-A A Rogers S Kedia S Samson and S Bhansali |
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Institution: | (1) Wuhan National Lab for Optoelectronics and School of Optoelectronics Science and Engineering, Huazhong University of Science and Technology, 1037 Luoyu Road, Wuhan, 430074, Hubei, P.R. China; |
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Abstract: | Near-field evanescent wave coupling of various subwavelength grating pairs, using a 1.55 μm infrared semiconductor laser has
been demonstrated for use as an optical MEMS sensor. Subwavelength grating pairs were fabricated on both glass and silicon
substrates. When coupled together the effective grating period is not subwavelength and can exhibit several diffraction orders.
The 1.55 μm infrared source was incident on the coupled pairs and the first-order output intensity was recorded and compared
with the output intensity from simulated results. This demonstrated evanescent wave coupling concept can be applied to MEMS
systems with nanometer gap separations (e.g., pressure sensors, biosensors, and accelerometers) to allow for subnanometer
displacement detection. |
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