Low dielectric materials from fluorinated polybenzoxazines

Fluorinated monomers containing a benzoxazine moiety have been synthesized successfully by preparing the benzoxazines from fluorinated amines (4‐fluoroaniline, 2,4‐difluoroaniline, and 2,3,4‐trifluoroaniline). These monomers were polymerized by step curing process following a cure cycle of 100, 150, 200 and 250°C for 1 h at each temperature. The molecular structure of the monomers and their polymers was characterized by Fourier transform infrared and nuclear magnetic resonance techniques. The synthesized fluorinated polybenzoxazines were able to reduce the dielectric constant to 2.0 for polybenzoxazine from 2,3,4 trifluoroaniline (PTF)‐Bzo at a frequency of 1 MHz. Moreover, they possess high thermal stability and low moisture absorption, which makes it suitable for high‐temperature process of interlayer dielectrics. Copyright © 2014 John Wiley & Sons, Ltd.