Pulsed laser deposition of carbon nitride films by a sub-ps laser期刊界 All Journals 搜尽天下杂志传播学术成果专业期刊搜索期刊信息化学术搜索

Pulsed laser deposition of carbon nitride films by a sub-ps laser

Authors:	Z. Geretovszky Z. Kántor I. Bertóti T. Szörényi

Affiliation:	Department of Optics and Quantum Electronics, JATE University, P.O. Box 406, 6701 Szeged, Hungary, HU Research Group on Laser Physics of the Hungarian Academy of Sciences, P.O. Box 406, 6701 Szeged, Hungary, HU Research Laboratory of Materials and Environmental Chemistry, Chemical Research Center of the Hungarian Academy of Sciences, P.O. Box 17, 1525 Budapest, Hungary, HU

Abstract:	CN_x (0.01-2 to 0.6 mbar the nitrogen content of the films increases monotonously, as determined by X-ray photoelectron spectroscopy. Raman spectroscopy reveals that the films consist predominantly of highly amorphous carbon.

Keywords:
本文献已被 SpringerLink 等数据库收录！