| 五角棱镜在建立大尺寸平面基准中的应用 |
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| 引用本文： | 郝群,赵洋.五角棱镜在建立大尺寸平面基准中的应用[J].光学学报,1998,18(8):134-1137. |
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| 作者姓名： | 郝群 赵洋 |
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| 作者单位： | 清华大学精密仪器系精密测试技术与仪器国家重点实验室 |
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| 摘 要： | 从五角棱镜的原理和特性出发，叙述了利用五角棱镜扫描建立大平面基准过程中，由于加工角差和当五角棱镜相对入射光束有相对运动时其出射光束的横移对平面基准的影响，提出了用衍射成像技术消除光束横移，数据计算修正棱镜的角度差的影响。
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| 关 键 词： | 五角棱镜 平面基准 衍射成像 大尺寸平面 |
| 收稿时间： | 1997/1/11 |
Application of Penta Prism in Establishing the Datum Plane for Measuring Flatness in Large Scale Dimension |
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| Abstract: | According to the operating principle and characteristic of pentagonal prism, it is analyzed that the fabrication error of the prism angles and the effect of lateral displacement of exit beam when the prism has a motion relative to the incident beam on the accuracy of the datum plane to be established. The Fresnel diffraction imaging technique is used to eliminate the effect of the lateral displacement and data calculating is used to calibrate the fbrication error of the angles. |
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| Keywords: | ? pentagonal prism datum plane diffraction imaging |
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