| 激光纳米振动测量技术研究 |
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| 引用本文： | 乐开端,贾书海,谭玉山.激光纳米振动测量技术研究[J].光子学报,1999,28(8):715-717. |
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| 作者姓名： | 乐开端 贾书海 谭玉山 |
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| 作者单位： | 西安交通大学激光与红外应用研究所,710049 |
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| 摘 要： | 本文通过对电子散斑小振幅振动测量的线性分析,实施一系列特殊算法、散斑平均技术及特殊图象处理等工作,使得纳米振动测量系统的测量精度得到较大提高.该系统将具有全场、非接触、测量速度快、测量精度高等优点,目前它也是纳米全场振动测量的唯一方法.
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| 关 键 词： | 纳米振动 激光散斑 |
| 收稿时间： | 1999-03-31 |
| 修稿时间： | 1999-03-31 |
ESPI USED FOR NANOMETER VIBRATION MEASUREMENT |
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| Yue Kaiduan,Jia Shuhai,Tan Yushan.ESPI USED FOR NANOMETER VIBRATION MEASUREMENT[J].Acta Photonica Sinica,1999,28(8):715-717. |
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| Authors: | Yue Kaiduan Jia Shuhai Tan Yushan |
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| Institution: | Institute of Laser & IR, Xi’an Jiaotong University, Xi’an, Shaanxi, China 710049 |
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| Abstract: | A novel measurement system for nanometer vibration measurement is presented in this
paper The system can not only measure the amplitude of the vibration,but also can calculate out
the phase of the nanometer vibration The resolution of amplitude is about 0 5 nanometer The
system has the advantages of high accuracy,high speed and price |
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| Keywords: | Nanometer vibration measurement Electronic speckle pattern interferometry(ESPI) |
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