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A new charge-correction method in X-ray photoelectron spectroscopy
Authors:Shigemi Kohiki  Takuichi Ohmura  Kenji Kusao
Affiliation:Materials Research Laboratory, Matsushita Electric Industrial Co., Ltd., Moriguchi, Osaka 570 Japan
Abstract:
The 2p32 binding energy (242.3 eV) of Ar implanted in insulating materials is available to correct for charging shifts. Argon ions hav materials SiO2 and soda glass. In each case the charging shift for Ar 2p32 electrons agrees exactly with those for core-level elec The charge-corrected binding energies of the insulating materials permit the identification of atomic chemical states. Ion-induced reduction of the ins investigations.
Keywords:
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