Measurement of Mach probe on plasma flow velocity in highly collisional plasma jet

A normalized plasma flow velocity in highly collisional plasma formed by a microwave plasma jet, which is dimensionless unit for plasma flow velocity/ion acoustic velocity, was measured by the parallel Mach probe. To deduce the normalized plasma flow velocity under highly collisional plasma conditions, the collisional model of a Mach probe was proposed. In addition, neutral gas flow velocity which assumed to be plasma flow velocity was calculated by the turbulent model. The results for the two different models were compared with those for the collsionless models of the Mach probe. The turbulent model produced 2–4 times reduced values than by measurements with collsionless models. The measured results with the collisional model were shown as approximately 100–250% lower than those for collsionless models. They were obtained to be in good agreement with difference rate of 10–30% when compared to those for the turbulent model.