合金钢材料光学常数的椭偏测量及其修正

用椭偏法测量了入射光波长0.632μm、入射角50°至85°时某合金钢的光学常数。考虑材料表面的粗糙度,用Ohlidal-Lukes理论对所测光学常数值进行修正,发现椭偏参量的修正量随入射角增大而增大。结果表明,用椭偏法测量合金钢光学常数时采用较小入射角能获得更精确的样片光学常数。

Measure optics constant of alloy steel with ellipsometry

Optics constants of alloy steel are measured with ellipsometry when the wavelength is 0.632μm and incidence angle is 50°—80°.As surfaces of alloy steel is rough,ellipsometric parameters are corrected by the Ohlidal-Lukes theory. Differences of the measurements and calculations increase along with incidence angle enlarge.The results indicate that more exact optics constants can be acquired when incidence angle of the light is smaller