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The aberration theory of a combined electron focusing–deflection system with a rotating deflection field following the rotation of the electrons
Authors:Yan Ren  Tiantong Tang  Yongfeng Kang  Xiaoli Guo
Institution:

aInstitute of Electron Physics and Devices, Department of electronics Science and Technology, School of Electronics and Information Engineering, Xi’an Jiaotong University, Xi’an 710049, PR China

Abstract:A new type of combined magnetic focusing–electrostatic deflection systems whose orientation of deflection field is rotated synchronously with the beam electrons is proposed. This rotation deflection field can be formed by twistification of tube wall electrode (TWE) deflectors. Formulae are derived for the first-order optical properties, third-order geometrical aberrations and first-order chromatic aberrations of this system. A program was written in FORTRAN for numerical computation. An example is given; the computation results show that compared to the conventional systems, the proposed new system has lower deflection aberration coefficients.
Keywords:Combined focusing–deflection systems  Aberration  Tube wall electrode
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