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Evaluation of Ni/Mn multilayer samples with glancing-incidence and take-off X-ray fluorescence analysis
Authors:S. Sato  K. Tsuji  K. Hirokawa
Affiliation:(1) Institute for Advanced Materials Processing, Tohoku University, 980-77 Sendai, Japan;(2) Institute for Materials Research, Tohoku University, 980 Sendai, Japan
Abstract:A Glancing-Incidence and Take-off X-Ray Fluorescence (GIT-XRF) apparatus with which both incident angle of primary X-ray and take-off angle of fluorescent X-rays can be controlled has been newly developed for characterizing surfaces and interfaces. Using this apparatus, Ni/Mn multilayer samples were evaluated obtaining Take-off-Angle-Dependent X-Ray Fluorescence (TAD-XRF) curves at arbitrary incident angles of primary X-ray. In particular, we could obtain information on the near surface by measuring TAD-XRF curves at the incident angle less than the critical angle of total reflection for primary X-rays.
Keywords:07.85. + n  68.35. - p  68.65. + g
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