氧化锌导电类型转化的热力学分析

为了更好了解ZnO在p型转化中存在的困难，文章对其进行了本征点缺陷的热力学分析，得到了热平衡状态时，ZnO中主要的点缺陷浓度与环境温度和氧气压的关系，并做出了其K-V 图.根据热力学分析结果，可以看出在热平衡状态下实现p型转化具有非常大的困难；还指出 了p型转化的有效途径.相关的试验也证明了这种分析的可行性. 关键词： p型转化 本征点缺陷 热力学分析 K-V图

Thermodynamical analysis of conductivity-type inversion in ZnO

In order to get more knowledge about the difficulty of conductivity-type inversion in ZnO, this paper performs the thermodynamical analysis of intrinsic point defects. Relations between the main defect concentrations and the environment pa rameters, such as the temperature and oxygen pressure, have been formulated unde r thermodynamical equilibrium. The K-V figure is presented. It is shown that it is very difficult to obtain p-type conductivity under thermodynamical equili brium. Based on these facts, this paper gives the effective approaches to realize p-type conductivity inversion. The feasibility of the analysis is also pro ved by some experiments.