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KBA型X射线显微镜精度控制方法
引用本文:赵玲玲,胡家升,孙德林. KBA型X射线显微镜精度控制方法[J]. 光学学报, 2008, 28(12): 2441-2445
作者姓名:赵玲玲  胡家升  孙德林
作者单位:1. 鲁东大学物理与电子工程学院,山东,烟台,264025
2. 大连理工大学电子与信息工程学院,辽宁,大连,116024
3. 鲁东大学交通学院,山东,烟台,264025
摘    要:
KBA(改进的KB)型X射线显微镜为掠入射非共轴反射成像系统.前一组反射镜和后一组反射镜之间并不是严格垂直的,给像质分析带来相当大的困难.通常的光学CAD软件难于适应这种光学系统.把共轴球面折射系统的向量公式调整后设计了掠入射非共轴KBA显微镜成像系统程序,并用该程序分析了KBA系统的像差及综合误差.分析结果表明,KBA显微镜系统是大像差系统,当物距公差为-0.4~ 1 mm,掠入射公差在-8"~0,双反射镜夹角公差在-20"~0,弥散斑的变化在允许的范围内.该程序对于分析和研制KBA显微镜系统具有重要意义.

关 键 词:X射线光学  X射线成像  KBA显微镜  掠入射反射成像  消像散系统
收稿时间:2007-11-12

Precision Controlling of KBA X-Ray Microscope
Zhao Lingling,Hu Jiasheng,Sun Delin. Precision Controlling of KBA X-Ray Microscope[J]. Acta Optica Sinica, 2008, 28(12): 2441-2445
Authors:Zhao Lingling  Hu Jiasheng  Sun Delin
Affiliation:Zhao Lingling1 Hu Jiasheng2 Sun Delin31School of Physics , Electronic Engineering,Ludong University,Yantai,Sh,ong 264025,China2School of Electronic , Information Engineering,Dalian University of Technology,Dalian,Liaoning 116024,China3School of Physics , Electronic Engineering,China
Abstract:
KBA X-ray microscope is a grazing non-coaxial incident X-ray microscope. The front pair mirrors are not perpendicular to the back pair strictly,which brings much difficulty to the analysis of image quality. Thus general optical CAD program is not suitable to this kind of optical system. The co-axial spherical refrective vector formulations are adjusted to establish the program for the non-coaxial grazing incident microscope,with which the aberrations and the synthesis errors are analyzed. The analytical res...
Keywords:X-ray optics  X-ray imaging  KBA microscope  grazing reflective imaging  anastigmatic system  
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